000 | 00809nam a2200229zi 4500 | ||
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005 | 20230201161143.0 | ||
008 | c 1987nuca eng0 09 | ||
020 | _a3540179518 | ||
035 | _aMX001000493931 | ||
050 |
_aTA1677 _bB69 |
||
100 | 0 |
_aBoyd, Ian W., 1958-, _eautor |
|
245 | 1 | 0 |
_aLaser processing and thin films and microstructures : _bOxidation, deposition and etching of insulators / _cIan w. boyd |
300 | _aViii, 286 páginas | ||
490 | 0 |
_aSpringer series in materials science ; _v3 |
|
650 |
_aLáseres _xAplicaciones industriales |
||
830 |
_aSpringer series in materials science _x 0933-033X |
||
264 | 1 |
_aBerlin : _bSpringer Verlag, _cc1987 |
|
336 |
_atexto _2rdacontent |
||
337 |
_asin medio _2rdamedia |
||
338 |
_avolumen _2rdacarrier |
||
999 |
_c793 _d793 |