000 00809nam a2200229zi 4500
005 20230201161143.0
008 c 1987nuca eng0 09
020 _a3540179518
035 _aMX001000493931
050 _aTA1677
_bB69
100 0 _aBoyd, Ian W., 1958-,
_eautor
245 1 0 _aLaser processing and thin films and microstructures :
_bOxidation, deposition and etching of insulators /
_cIan w. boyd
300 _aViii, 286 páginas
490 0 _aSpringer series in materials science ;
_v3
650 _aLáseres
_xAplicaciones industriales
830 _aSpringer series in materials science
_x 0933-033X
264 1 _aBerlin :
_bSpringer Verlag,
_cc1987
336 _atexto
_2rdacontent
337 _asin medio
_2rdamedia
338 _avolumen
_2rdacarrier
999 _c793
_d793