| 000 | 01095nam a2200253zi 4500 | ||
|---|---|---|---|
| 005 | 20230201161143.0 | ||
| 008 | c 1988dgba eng0 12 | ||
| 020 | _a0871703300 | ||
| 035 | _aMX001000478307 | ||
| 050 |
_aQC718 _bI65 1988 |
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| 245 | 0 | 0 |
_aIon implantation and plasma assisted processes / _cEd. by Robert f. hochman, hillary solnick-legg, Keith o. legg |
| 300 | _aix, 205 páginas | ||
| 500 | _aActas de la conferencia sobre ion implantation and plasma assisted processes for industrial applications. atlanta, georgia, 22-25 mayo 1988 | ||
| 500 | _aPatrocinado por ion implantation committee and the plasma processes committee of the surface treating and coating division of asm international | ||
| 650 |
_aPlasma (Gases ionizados) _vCongresos |
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| 700 |
_aLegg, Keith O. _eeditor |
||
| 700 |
_aHochman, Robert F., _eeditor |
||
| 700 |
_aSolnick-legg, Hillary _eeditor |
||
| 264 | 1 |
_aMetals park, ohio : _bASM International, _cc1988 |
|
| 336 |
_atexto _2rdacontent |
||
| 337 |
_asin medio _2rdamedia |
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| 338 |
_avolumen _2rdacarrier |
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| 999 |
_c747 _d747 |
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