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| 001 | 000125328 | ||
| 005 | 20230201161427.0 | ||
| 008 | 990315c19919999xxubr_p_d_________a_eng_d | ||
| 022 |
_a1071-1023 _y0734-211X |
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| 035 | _aSER01000125328 | ||
| 040 |
_aUNAMX _bspa _erda _cUNAMX |
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| 041 | _aeng | ||
| 050 | 1 | 4 | _aTJ940 |
| 082 | 1 | 4 | _a621.381 |
| 210 | 1 | _aJ. vac. sci. technol., B Microelectron. nanometer struct. process. meas. phenom. | |
| 222 | 0 | 0 | _aJournal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena |
| 245 | 0 | 0 | _aJournal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena |
| 246 | 1 | 0 | _aJournal of vacuum science and technology. B, Microelectronics and nanometer structures |
| 246 | 1 | 3 | _aMicroelectronics and nanometer structures |
| 246 | 1 | 3 | _aJVSTB (New York, N.Y.) |
| 264 | 1 |
_aNew York, N.Y. : _bAmerican Institute of Physics, _c1991- |
|
| 310 | _aBimestral | ||
| 336 |
_atexto _2rdacontent |
||
| 337 |
_asin medio _2rdamedia |
||
| 338 |
_avolumen _2rdacarrier |
||
| 500 | _aTitulo de la cubierta | ||
| 530 | _aTambien disponible en PDF y Postscript formats via WWW | ||
| 550 | 0 | _aPublicada para la American Vacuum Society por el American Institute of Physics | |
| 650 | 4 | _aTecnología del vacío. | |
| 650 | 4 | _aMicroelectrónica. | |
| 650 | 4 |
_aNanopartículas _xMedicion. |
|
| 710 | 2 | 1 | _aAmerican Vacuum Society. |
| 776 | 0 |
_tJournal of vacuum science & technology (Online) _x1520-8567 _w(UNAMX) 000132790 |
|
| 780 | 0 | 0 |
_tJournal of vacuum science & technology. B, Microelectronics processing and phenomena _x0734-211X _w(UNAMX) 000017898 |
| 999 |
_c3973 _d3973 |
||