| 000 | 01725nas a2200445zi 4500 | ||
|---|---|---|---|
| 001 | 000017800 | ||
| 005 | 20230201161426.0 | ||
| 008 | 130685c19839999xxubr_p_d_________a_eng_d | ||
| 022 | _a0734-2101 | ||
| 030 | _aJVTAD6 | ||
| 035 | _aSER01000017800 | ||
| 040 |
_aUNAMX _bspa _erda _cUNAMX |
||
| 041 | _aeng | ||
| 050 | 1 | 4 | _aTJ940 |
| 082 | 1 | 4 | _a621.5 |
| 210 | 1 | _aJ. vac. sci. technol., A Vac. surf. films | |
| 222 | 0 | 0 | _aJournal of vacuum science & technology. A, Vacuum, surfaces, and films |
| 245 | 0 | 0 | _aJournal of vacuum science & technology. A, Vacuum, surfaces, and films |
| 246 | 1 | 0 | _aJournal of vacuum science and technology. A, Vacuum, surfaces, and films |
| 246 | 1 | 0 | _aVacuum, surfaces, and films |
| 246 | 1 | 3 | _aJVST A |
| 264 | 1 |
_aNew York, N.Y. : _bAmerican Institute of Physics, _c1983- |
|
| 310 | _aBimestral | ||
| 336 |
_atexto _2rdacontent |
||
| 337 |
_asin medio _2rdamedia |
||
| 338 |
_avolumen _2rdacarrier |
||
| 500 | _aTítulo de la cubierta | ||
| 500 | _aInicia en 1983 con el vol. 1, no. 1 | ||
| 510 | 0 | _aChemical abstracts | |
| 525 | _aAlgunos números acompañados de suplementos | ||
| 530 | _aTambién disponible vía Internet | ||
| 530 | _aEditada también en micropelícula | ||
| 550 | 0 | _aPublicada para la American Vacuum Society por el American Institute of Physics | |
| 650 | 4 | _aTecnología del vacío. | |
| 710 | 2 | 1 | _aAmerican Vacuum Society |
| 710 | 2 | 1 | _aAmerican Institute of Physics |
| 776 | 0 |
_tJournal of vacuum science & technology. A (En línea) _x1520-8559 _w(UNAMX) 000132789 |
|
| 780 | 0 | 1 |
_tJournal of vacuum science & technology _x0022-5355 |
| 787 | 0 |
_tProceedings of the U.S. Workshop on the Physics and Chemistry of Mercury Cadmium Telluride _x1056-6546 |
|
| 999 |
_c3903 _d3903 |
||