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| 008 | 101006s2007 xxua b 001 0 eng | ||
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_aMicrolithography : _bscience and technology / _cedited by Kazuaki Suzuki, Bruce W. Smith. |
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_a848 páginas : _bilustraciones |
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_aOptical science and engineering ; _v126 |
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_aMicrolitografía _xAplicaciones industriales |
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_aCircuitos integrados _xMáscaras |
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_aSemiconductores complementarios de óxido metálico _xDiseño y construcción |
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| 650 | 0 | _aProcesos de manufactura | |
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_aSuzuki, Kazuhiro, _eeditor |
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_aSmith, Bruce W., _d1959- , _eeditor |
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_aBoca Ratón, Florida : _bCRC Press, _cc2007 |
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_asin medio _2rdamedia |
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