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_a621.3815/31 _222 |
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_aMack, Chris A., _eautor |
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245 | 1 | 0 |
_aField guide to optical lithography / _cChris A. Mack |
300 |
_axii, 122 páginas : _bilustraciones |
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490 | 0 |
_aSPIE field guides ; _vFG06 |
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650 | 0 |
_aCircuitos integrados _xDiseño y construcción |
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650 | 0 | _aMicrolitografía | |
264 | 1 |
_aBellingham, Washington : _bSPIE, _c2006 |
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336 |
_atexto _2rdacontent |
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_asin medio _2rdamedia |
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