| 000 | 00863nam a2200265zi 4500 | ||
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| 005 | 20230201161205.0 | ||
| 008 | 040615s2003 xxka 000 0 eng d | ||
| 020 | _a0125112211 | ||
| 035 | _aMX001001001121 | ||
| 040 |
_aYRM _bspa _cYRM _dVPI _dUNAMX |
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| 041 | _aENG | ||
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_aTK7871.85 _bI576 |
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_aInterlayer dielectrics for semiconductor technologies / _cedited by S. P. Murarka, M. Eizenberg, A. K. Sinha |
| 300 |
_axiv, 444 páginas : _bilustraciones |
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| 650 | 4 | _aLáminas semiconductoras | |
| 650 | 4 | _aDieléctricos | |
| 700 |
_aMurarka, Shyam P., _eeditor |
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| 700 | 1 |
_aEizenberg, Moshe, _eeditor |
|
| 700 | 1 |
_aSinha, Ashok K., _eeditor |
|
| 264 | 1 |
_aAmsterdam : _bElsevier/Academic, _c2003 |
|
| 336 |
_atexto _2rdacontent |
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| 337 |
_asin medio _2rdamedia |
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| 338 |
_avolumen _2rdacarrier |
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| 999 |
_c2836 _d2836 |
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