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_a621.3815/2 _221 |
| 100 | 1 |
_aBarnat, Edward V., _eautor |
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| 245 | 1 | 0 |
_aPulsed and pulsed bias sputtering : _bprinciples and applications / _cby Edward V. Barnat, Toh-Ming Lu |
| 300 |
_ax, 155 páginas : _bilustraciones |
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| 650 | 0 | _aPulverización catódica (Metalización) | |
| 650 | 0 | _aPelículas delgadas | |
| 700 | 1 |
_aLu, Toh-Ming, _d1943- , _eautor |
|
| 264 | 1 |
_aBoston : _bKluwer Academic, _cc2003 |
|
| 336 |
_atexto _2rdacontent |
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| 337 |
_asin medio _2rdamedia |
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| 338 |
_avolumen _2rdacarrier |
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_c2798 _d2798 |
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