000 01309nam a2200313zi 4500
005 20230201161204.0
008 030206c 2002paua b 101 0 eng
020 _a1558996419
035 _aMX001000945701
040 _aZCU
_cZCU
041 _aENG
050 0 _aQC176.8N35
_bS948
111 2 _aSymposium Y, "Nanopatterning--From Ultralarge-Scale Integration to Biotechnology"
_d(2001 :
_cBoston, Massachussetts)
245 1 0 _aNanopatterning--from ultralarge-scale integration to biotechnology :
_bsymposium held November 25-29, 2001, Boston, Massachusetts, U.S.A. /
_ceditors, Lhadi Merhari ... [y otros.]
300 _axiii, 338 páginas :
_bilustraciones
490 0 _aMaterials Research Society symposium proceedings ;
_vv. 705
650 0 _aBiotecnología
_vCongresos
650 0 _aCircuitos integrados
_xUltra integración a gran escala
_vCongresos
650 0 _aMicrolitografia
_vCongresos
650 0 _aNanoestructuras
_vCongresos
650 0 _aNanotecnología
_vCongresos
700 1 _aMerhari, Lhadi,
_eeditor
830 _aMaterials Research Society symposium proceedings
_x 0272-9172
264 1 _aWarrendale :
_bMaterials Research Society,
_cc2002
336 _atexto
_2rdacontent
337 _asin medio
_2rdamedia
338 _avolumen
_2rdacarrier
999 _c2683
_d2683