000 | 00815nam a2200229zi 4500 | ||
---|---|---|---|
005 | 20230201161203.0 | ||
008 | 021007c 2002xxua f 000 0 eng d | ||
020 | _a0815514425 | ||
035 | _aMX001000933849 | ||
041 | _aSPA | ||
050 | 4 |
_aTK7872.P45 _bH35 2002 |
|
245 | 0 | 0 |
_aHandbook of thin-film deposition processes and techniques : _bprinciples, methods, equipment and applications / _cedited by Krishna Seshan |
250 | _a2nd ed. | ||
300 |
_a629 páginas : _bilustraciones |
||
650 | 4 |
_aDispositivos de películas delgadas _xDiseño y construcción _vManuales |
|
700 | 1 |
_aSeshan, Krishna, _eeditor |
|
264 | 1 |
_aNorwich, New York : _bNoyes : _bW. Andrew, _cc2002 |
|
336 |
_atexto _2rdacontent |
||
337 |
_asin medio _2rdamedia |
||
338 |
_avolumen _2rdacarrier |
||
999 |
_c2668 _d2668 |