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| 008 | 001024c 1998ge a b 001 0 eng | ||
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_aUltraclean surface processing of silicon wafers : _bsecrets of VLSI manufacturing / _cTakeshi Hattori (ed.) |
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_axxviii, 616 páginas : _bilustraciones ; |
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| 504 | _aIncluye referencias bibliograficas e indice | ||
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_aLáminas semiconductoras _xLimpieza |
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| 650 | 0 |
_aSilicio _xSuperficies |
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| 650 | 0 | _aTratamiento de superficies | |
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_aHattori, Takeshi, _d1945- , _eeditor |
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| 264 | 1 |
_aBerlin : _bSpringer Verlag, _cc1998 |
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| 336 |
_atexto _2rdacontent |
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_asin medio _2rdamedia |
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_avolumen _2rdacarrier |
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_c2391 _d2391 |
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