| 000 | 00953nam a2200289zi 4500 | ||
|---|---|---|---|
| 005 | 20230201161157.0 | ||
| 008 | 980922s1995 njua b 001 0 eng | ||
| 020 | _a0815513771 | ||
| 035 | _aMX001000802602 | ||
| 040 |
_aDLC _cDLC _dDLC |
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| 041 | _aENG | ||
| 050 | 0 | 0 |
_aQC718.5D4 _bH54 |
| 082 | 0 | 0 |
_a621.044 _220 |
| 245 | 0 | 0 |
_aHigh density plasma sources : _bdesign, physics, and performance / _cedited by Oleg A. Popov |
| 300 |
_axx, 445 páginas : _bilustraciones ; |
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| 490 | 0 | _aMaterials science and process technology series | |
| 504 | _aIncluye referencias bibliograficas e indices. | ||
| 650 | 0 | _aDensidad del plasma | |
| 650 | 0 | _aGeneradores de plasma | |
| 650 | 0 | _aPlasmas a altas temperaturas | |
| 700 | 1 |
_aPopov, Oleg A., _eeditor |
|
| 264 | 1 |
_aPark Ridge, New Jersey : _bNoyes, _cc1995 |
|
| 336 |
_atexto _2rdacontent |
||
| 337 |
_asin medio _2rdamedia |
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| 338 |
_avolumen _2rdacarrier |
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| 999 |
_c2124 _d2124 |
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