000 | 00764nam a2200229zi 4500 | ||
---|---|---|---|
005 | 20230201161154.0 | ||
008 | 970106s1995 a 000 0 eng d | ||
020 | _a0750303115 | ||
035 | _aMX001000721306 | ||
050 |
_aTK787.15F5 _bH35 |
||
245 | 0 | 0 |
_aHandbook of thin film process technology / _ceds. David A Glocker, S. Ismat Shah |
300 | _a1 volumen (en varias paginaciones) | ||
650 |
_aPelĂculas delgadas _vManuales, etc. |
||
650 |
_aSuperficies (TecnologĂa) _vManuales |
||
700 |
_aGlocker, David A. _eeditor |
||
700 |
_aShah, S. Ismat _eeditor |
||
264 | 1 |
_aBristol : _bInstitute of Physics, _cc1995 |
|
336 |
_atexto _2rdacontent |
||
337 |
_asin medio _2rdamedia |
||
338 |
_avolumen _2rdacarrier |
||
999 |
_c1811 _d1811 |