| 000 | 00691nam a2200205zi 4500 | ||
|---|---|---|---|
| 005 | 20230201161152.0 | ||
| 008 | 970106s1993 000 0 eng | ||
| 020 | _a0815513313 | ||
| 035 | _aMX001000677489 | ||
| 050 |
_aTK7871.85 _bH358 |
||
| 245 | 0 | 0 |
_aHandbook of semiconductor wafer cleaning technology : _bScience, technology, and applications / _cEd. by werner kern |
| 300 | _axx, 623 páginas | ||
| 650 |
_aLáminas semiconductoras _xLimpieza |
||
| 700 |
_aKern, Werner _d1925- _eeditor |
||
| 264 | 1 |
_aPark ridge, new jersey : _bNoyes, _cc1993 |
|
| 336 |
_atexto _2rdacontent |
||
| 337 |
_asin medio _2rdamedia |
||
| 338 |
_avolumen _2rdacarrier |
||
| 999 |
_c1594 _d1594 |
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