| 000 | 00783nam a2200229zi 4500 | ||
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| 005 | 20230201161149.0 | ||
| 008 | 040830s1992 000 0 eng | ||
| 020 | _a0815512805 | ||
| 035 | _aMX001000616395 | ||
| 050 |
_aTS695 _bW37 1992 |
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| 100 | 0 |
_aWasa, Kiyotaka, _eautor |
|
| 245 | 1 | 0 |
_aHandbook of sputter deposition technology : _bPrinciples, technology, and applications / _cBy kiyotaka wasa, shigeru hayakawa |
| 300 | _a304 páginas | ||
| 650 | _aPulverización catódica (Metalización) | ||
| 650 | _aPelículas delgadas | ||
| 700 |
_aHayakawa, Shigeru, _d1925- , _eautor |
||
| 264 | 1 |
_aPark ridge, new yersey : _bNoyes, _c1992 |
|
| 336 |
_atexto _2rdacontent |
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| 337 |
_asin medio _2rdamedia |
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| 338 |
_avolumen _2rdacarrier |
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| 999 |
_c1325 _d1325 |
||