TY  - BOOK
AU  - Legg, Keith O.
AU  - Hochman, Robert F.,
AU  - Solnick-legg, Hillary
TI  - Ion implantation and plasma assisted processes
SN  - 0871703300
AV  - QC718 I65 1988
PY  - 1988///
CY  - Metals park, ohio
PB  - ASM International
KW  - Plasma (Gases ionizados)
KW  - Congresos
N1  - Actas de la conferencia sobre ion implantation and plasma assisted processes for industrial applications. atlanta, georgia, 22-25 mayo 1988; Patrocinado por ion implantation committee and the plasma processes committee of the surface treating and coating division of asm international
ER  -