Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena 
 Journal of vacuum science and technology. B, Microelectronics and nanometer structures  Microelectronics and nanometer structures  JVSTB (New York, N.Y.) 

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<br/><br/> Titulo de la cubierta 
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<br/><br/>Publicada para la American Vacuum Society por el American Institute of Physics 
<br/><br/><label>ISSN: </label>1071-1023 
 = Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena 
 = J. vac. sci. technol., B Microelectron. nanometer struct. process. meas. phenom. 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Tecnología del vacío.<br/>Microelectrónica.<br/>Nanopartículas--Medicion.
<br/><br/><label>LC Class. No.: </label>TJ940 
<br/><br/><label>Dewey Class. No.: </label>621.381