TY  - BOOK
AU  - Fukuda,Hisashi
ED  - International Conference on Rapid Thermal Processing for Future Semiconductor Devices
TI  - Rapid thermal processing for future semiconductor devices: proceedings of the 2001 International Conference on Rapid Thermal Processing for Future Semiconductor Devices (RTP 2001), held at Ise-Shima, Mie, Japan, November 14-16, 2001 
SN  - 0444513396
AV  - TK7871.85 I5786 2001
PY  - 2003///
CY  - London
PB  - Elsevier
KW  - Semiconductores
KW  - Tratamiento termico
KW  - Congresos
KW  - Procesamiento termico rapido
ER  -