Rapid thermal processing for future semiconductor devices :  proceedings of the 2001 International Conference on Rapid Thermal Processing for Future Semiconductor Devices (RTP 2001), held at Ise-Shima, Mie, Japan, November 14-16, 2001 / 
edited by Hisashi Fukuda 
 - x, 150 páginas :  ilustraciones 
<br/><br/><label>ISBN: </label>0444513396 9780444513397 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Semiconductores--Tratamiento termico--Congresos<br/>Procesamiento termico rapido--Congresos
<br/><br/><label>LC Class. No.: </label>TK7871.85  / I5786 2001