TY  - BOOK
AU  - Freund,L.B.
AU  - Suresh,Subra
TI  - Thin film materials: stress, defect formation, and surface evolution 
SN  - 0521822815
AV  - TA418.9T45 F74
U1  - 621.3815/2 21
PY  - 2003///
CY  - Cambridge, [England]
PB  - Cambridge University Press
KW  - Películas delgadas
ER  -