TY  - BOOK
AU  - Merhari,Lhadi
ED  - Symposium Y, "Nanopatterning--From Ultralarge-Scale Integration to Biotechnology"
TI  - Nanopatterning--from ultralarge-scale integration to biotechnology: symposium held November 25-29, 2001, Boston, Massachusetts, U.S.A. 
T2  - Materials Research Society symposium proceedings
SN  - 1558996419
AV  - QC176.8N35 S948
PY  - 2002///
CY  - Warrendale
PB  - Materials Research Society
KW  - Biotecnología
KW  - Congresos
KW  - Circuitos integrados
KW  - Ultra integración a gran escala
KW  - Microlitografia
KW  - Nanoestructuras
KW  - Nanotecnología
ER  -