TY  - BOOK
AU  - Campbell,Stephen A.
TI  - The science and engineering of microelectronic fabrication
T2  - The Oxford series in electrical and computer engineering
SN  - 0195136055
AV  - TK7871.85 C34 2001
PY  - 2001///
CY  - New York, México City :
PB  - Oxford University Press
KW  - Semiconductores
KW  - Diseño y construcción
ER  -