TY  - BOOK
AU  - Hitchon,W.Nicholas G.
TI  - Plasma processes for semiconductor fabrication
T2  - Cambridge studies in semiconductor physics and microelectronic engineering
SN  - 0521591759 (empastado, cubierta dura)
AV  - TK7871.85 H574
U1  - 621.3815/2 21
PY  - 1999///
CY  - Cambridge, [United Kingdom]
PB  - Cambridge University Press
KW  - Semiconductores
KW  - Ataque quimico
KW  - Ataque por plasma
ER  -