TY  - BOOK
AU  - Francombe,Maurice H.
AU  - Vossen,John L.
TI  - Plasma sources for thin film deposition and etching
T2  - Physics of thin films : advances in research and development
SN  - 0125330189
AV  - QC176.84 P53
PY  - 1994///
CY  - San Diego, California
PB  - Academic
KW  - Películas delgadas
KW  - Plasma (Gases ionizados)
ER  -