TY  - BOOK
AU  - Kern, Werner
TI  - Handbook of semiconductor wafer cleaning technology: Science, technology, and applications 
SN  - 0815513313
AV  - TK7871.85 H358
PY  - 1993///
CY  - Park ridge, new jersey
PB  - Noyes
KW  - Láminas semiconductoras
KW  - Limpieza
ER  -