Handbook of semiconductor wafer cleaning technology :  Science, technology, and applications / 
Ed. by werner kern 
 - xx, 623 páginas 
<br/><br/><label>ISBN: </label>0815513313 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Láminas semiconductoras--Limpieza
<br/><br/><label>LC Class. No.: </label>TK7871.85  / H358