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Rapid thermal processing for future semiconductor devices : proceedings of the 2001 International Conference on Rapid Thermal Processing for Future Semiconductor Devices (RTP 2001), held at Ise-Shima, Mie, Japan, November 14-16, 2001 / edited by Hisashi Fukuda - x, 150 páginas : ilustraciones

ISBN: 0444513396 9780444513397

Subjects--Topical Terms:
Semiconductores--Tratamiento termico--Congresos
Procesamiento termico rapido--Congresos

LC Class. No.: TK7871.85 / I5786 2001